ISO 14644-10:2022 洁净室和相关受控环境 第10部分：化学浓度法进行表面洁净度分类

标准编号：ISO 14644-10:2022

中文名称：洁净室和相关受控环境 第10部分：化学浓度法进行表面洁净度分类

英文名称：Cleanrooms and associated controlled environments — Part 10: Assessment of surface cleanliness for chemical contamination

发布日期：2022-05

标准范围

本文件建立了适当的测试过程，以确定洁净室表面是否存在化合物或元素（包括分子、离子、原子和颗粒）。本文件适用于洁净室和相关受控环境中的所有固体表面，如墙壁、天花板、地板、工作表面、工具、设备和装置。注意1.在本文件中，仅考虑颗粒的化学特性。未考虑颗粒的物理性质，本文件未涵盖污染物与表面之间的相互作用。注意2.本文件不包括污染物产生过程或任何与时间相关的影响（例如沉积、沉淀、老化）或与过程相关的活动，例如运输和搬运。它也不包括关于统计质量的指导-确保合规性的控制技术。

This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices.NOTE 1    For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface.NOTE 2    This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance.

标准预览图