ISO/TR 15969:2021 表面化学分析 深度剖面 喷溅深度测定

标准编号：ISO/TR 15969:2021

中文名称：表面化学分析 深度剖面 喷溅深度测定

英文名称：Surface chemical analysis — Depth profiling — Measurement of sputtered depth

发布日期：2021-03

标准范围

本文件提供了在溅射深度剖面中测量溅射深度的指南本文件中描述的溅射深度测量方法适用于与离子轰击结合使用的表面化学分析技术，用于将固体样品的一部分去除到高达几微米的典型溅射深度。这种方法通常确定的深度在1 nm到500μm之间。

This document provides guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this document are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres. The depth typically determined by this approach is between 1 nm to 500 μm.

标准预览图