ISO 14644-2:2015 洁净室及相关受控环境第2部分：用粒子浓度监测提供与空气洁净度相关的洁净室性能的证据

标准编号：ISO 14644-2:2015

中文名称：洁净室及相关受控环境第2部分：用粒子浓度监测提供与空气洁净度相关的洁净室性能的证据

英文名称：Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration