ISO 14644-9:2022 清洁室及相关受控环境 第9部分：微粒浓度法进行表面清洁度分级

标准编号：ISO 14644-9:2022

中文名称：清洁室及相关受控环境 第9部分：微粒浓度法进行表面清洁度分级

英文名称：Cleanrooms and associated controlled environments — Part 9: Assessment of surface cleanliness for particle concentration

发布日期：2022-05

标准范围

本文件建立了洁净室和相关受控环境应用中固体表面颗粒清洁度水平的评估程序。关于测试和测量方法的建议，以及关于表面特性的信息，见附件A到D。本文件适用于洁净室和相关受控环境中的所有固体表面，如墙壁、天花板、地板、工作环境、工具、设备和产品。通过颗粒浓度（SCP）评估表面清洁度的程序仅限于0.05？之间的颗粒μm和500μm。本文件未考虑以下问题:—？特定工艺的表面清洁度和适用性要求；—？表面清洁程序；—？材料特性；—？交互键合力或生成过程通常与时间和过程有关；—？选择和使用统计方法进行评估和测试；—？粒子的其他特性，如静电电荷、离子电荷和微生物状态。

This document establishes a procedure for the assessment of particle cleanliness levels on solid surfaces in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.This document applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The procedure for the assessment of surface cleanliness by particle concentration (SCP) is limited to particles of between 0,05 μm and 500 μm.The following issues are not considered in this document:—    requirements for the cleanliness and suitability of surfaces for specific processes;—    procedures for the cleaning of surfaces;—    material characteristics;—    references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;—    selection and use of statistical methods for assessment and testing;—    other characteristics of particles, such as electrostatic charge, ionic charges and microbiological state.

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