ISO 14644-3:2005 洁净室及相关受控环境 第3部分：试验方法

标准编号：ISO 14644-3:2005

中文名称：洁净室及相关受控环境 第3部分：试验方法

英文名称：Cleanrooms and associated controlled environments — Part 3: Test methods

发布日期：2005-12

标准范围

ISO 14644-3:2005规定了空气颗粒清洁度的指定分类以及洁净室和洁净区性能表征的试验方法。规定了两种类型的洁净室和洁净区的性能测试:单向流动的洁净室和非单向流动的洁净区，在三种可能的占用状态下:竣工、静止和运行。ISO 14644-3:2005不适用于洁净室或分离装置中产品或过程的测量。

ISO 14644-3:2005 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational.ISO 14644-3:2005 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

标准预览图