ISO 18114:2003 表面化学分析-中级离子光谱法-离子安放参考材料相关灵敏因素测定

标准编号：ISO 18114:2003

中文名称：表面化学分析-中级离子光谱法-离子安放参考材料相关灵敏因素测定

英文名称：Surface chemical analysis — Secondary-ion mass spectrometry — Determination of relative sensitivity factors from ion-implanted reference materials

发布日期：2003-04

标准范围

ISO 18114:2003规定了从离子注入标准物质中测定二次离子质谱（SIMS）相对灵敏度因子（RSF）的方法。该方法适用于基质化学成分均匀，且注入物种峰值浓度不超过1个原子百分比的试样。

ISO 18114:2003 specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials.The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.

标准预览图